HBO® Mercury Short Arc Lamps (>200W)

Precision performance

HBO Lamp for Semiconductor

Key Features and Benefits

  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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Product Details

OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

HBO® > 200 W for ASML

High performance semiconductor lamps for ASML equipment.

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HBO® > 200 W for Canon

High performance semiconductor lamps for Canon equipment.

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HBO® > 200 W for Nikon

High performance semiconductor lamps for Nikon equipment.

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HBO® > 200 W for Süss

High performance semiconductor lamps for Süss equipment.

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HBO® > 200 W for TEL

High performance semiconductor lamps for TEL equipment.

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HBO® > 200 W for Other Equipment

High performance semiconductor lamps for other equipment types.

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Applications for HBO® > 200W

Applications

Industrial

  • Semiconductor

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