HBO® Mercury Short Arc Lamps (>200W)
Key Features and Benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.