HBO® Mercury Short Arc Lamps (>200W)

Precision performance

HBO Lamp for Semiconductor

Key Features and Benefits

  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss

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Product Details

OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

View our product offering by equipment in the expandable sections below.

HBO® > 200W for ASML

HBO® > 200W for ASML

> Select an item for more details from our e-catalog

Product
Number

Product
Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg.
Life

69205HBO 500 W/A50060.08.3DC800
69206HBO 500 W/B50048.510.3DC800
69180HBO 1003 W/PIL75027.125.8DC1500
69181HBO 1500 W/PIL150023.065.2DC1500
69501HBO 2100 W/PIL210024.087.5DC1500
69172HBO 2500 W/PIL250028.090.0DC1500
69593HBO 3502 W/PIL340023.0148.0DC2250
69521HBO 5500 W/PIL500027.0200.0DC1500
69556HBO 5510 W/PIHL550027.0204.0DC1500
HBO® > 200W for Canon

HBO® > 200W for Canon

> Select an item for more details from our e-catalog

Product Number

Product Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg. Life

69246HBO 250 W/BY25040.06.5DC1000
69177HBO 1002 W/CEL75047.016.0DC2500
69171HBO 1500 W/CIEL150023.065.2DC2250
69166HBO 2001 W/CIEL200026.077.0DC2250
69157HBO 2001 W/CIELX200023.088.0DC3000
69199HBO 2002 W/MA200037.054.0DC1000
69344HBO 2700 W/CIL270026.0110.0DC1500
69162HBO 4500 W/CIL450030.0148.0DC2250
HBO® > 200W for Nikon

HBO® > 200W for Nikon

> Select an item for more details from our e-catalog

Product Number

Product Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg. Life

69176HBO 1000 W/NEL75047.016.0DC2500
69273HBO 1002 W/NEL75047.016.0DC2500
69347HBO 1002 W/NIL100027.127.1DC1500
69303HBO 2000 W/NIL175026.067.0DC1500
69306HBO 2001 W/NIEL175026.067.0DC2100
69287HBO 2002 W/NIL175026.067.0DC1500
69288HBO 2011 W/NIL200025.080.0DC1500
69299HBO 2510 W/NIL250023.0109.0DC1500
69456HBO 3500 W/NIL350027.0130.0DC2250
69116HBO 5002 W/NIL500032.0156.0DC2250
68899HBO 7500 W/NILH2750036.5198.0DC1500
HBO® > 200W for Süss

HBO® > 200W for Süss

> Select an item for more details from our e-catalog

Product Number

Product Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg. Life

69228HBO 350 W/S36068.05.15DC600
69200HBO 1000 W/D100037.726.5DC1500
 HBO® > 200W for TEL

HBO® > 200W for TEL

> Select an item for more details from our e-catalog

Product Number

Product Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg. Life

69168HBO 201 W/HS-D220025.08.0DC1000
69364HBO 250 W/HS25040.06.25DC1000
69553HBO 250 W/HS25040.06.25DC3500
 HBO® > 200W for Other Equipment

HBO® > 200W for Other Equipment

> Select an item for more details from our e-catalog

Product Number

Product Description

Nominal Wattage

Nominal Voltage

Current

Type of Current

Avg. Life

69226HBO 350 W35067.55.3DC600
69137HBO 3500 W/HK350055.063.5DC1000
69138HBO 5000 W/HK500070.072.0DC1000
69135HBO 5000 W/TA500050.0100.0DC850
Applications for HBO® > 200W

Applications

Industrial

  • Semiconductor

Customer Service

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*Warranty claims also available through customer service.