HBO > 200W for Nikon

OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

Product features and benefits
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with Nikon
Areas of application
  • Semiconductor

General product information

Product Number 69176
Product Name HBO1000WNEL 47V 1/CS 1/SKU
Ordering Abbreviation HBO 1000 W/NEL
Brand Name OSRAM
Family Brand Name HBO
General Description 750 watt, mercury short arc, double-ended lamp for semiconductor
applications in Nikon NSR-1505 G3,G4,A,B,C,D stepper(s)
Application Semiconductor
Product Remark
  • Cathode base with cable connection (M5)
  • Lamps suitable for pulse operation between 700W and 1000W. Maximum permissible average power is 750W (also for constant power operation).
  • Cathode Base with cooling fins.
  • Anode sleeve base without thread.

Electrical data

Nominal Wattage 750 W
Nominal Voltage 47 V
Current (A) 16 A
Type of Current DC

Light technical data

Radiant intensity in 350-450 nm range (mW/sr) 8300 mW/sr
Radiant Power in 350-450 nm range (W) 82 W
Light Center Length - LCL (mm) 84.5 mm
Average Rated Life 2500 h

Physical attributes

Base Anode SFa15-5/16
Base Cathode SFaX14-5/21
Bulb Shape T28
Maximum Overall Length (mm) 190 mm
Length l1 (mm) 190 mm
Length l1 max. (mm) 190 mm
Length l2 (mm) 166 mm
Length l2 max. (mm) 168 mm
Diameter d (in) 1.102 in
Diameter d (mm) 28.00 mm
Distance a (mm) 84.5 mm
Electrode Gap - cold (mm) 3 mm
Reflector Coating 28.00

Additional product data

Operating Position Vertical, anode down
Maximum Base Temperature (ºC) 200 C
Cooling Convection
Class C (gas)
Lamp Type DOUBLE ENDED

Product number

EAN/UPC

Packaging

Quantity

Outside dimensions l x w x h

Gross weight

69176 4050300412603 Shipping box (Case) 1 13in x 4.3in x 4.5in 0.9lb