HBO > 200W for ASML

OSRAM HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

Product features and benefits
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with ASML
Areas of application
  • Semiconductor

General product information

Product Number 69205
Product Name HBO500WA 60V 10/CS 1/SKU
Ordering Abbreviation HBO 500 W/A
Brand Name OSRAM
General Description 500 watt, mercury short arc, double-ended lamp for semiconductor
applications in ASML PAS 5000/50,/60,/80 stepper(s)
Application Semiconductor
Product Remark
  • Lamp service life is defined with a switch-on/switch off duty cycle of 12hours ON / 30 minutes OFF.
  • Lamp base(s) with M 5x0.9 thread.

Electrical data

Nominal Wattage 500 W
Nominal Voltage 60 V
Current (A) 8.3 A
Type of Current DC

Light technical data

Average Luminance (cd/cm2) 37000 cd/cm2
Radiant intensity in 350-450 nm range (mW/sr) 6230 mW/sr
Radiant Power in 350-450 nm range (W) 61 W
Light Center Length - LCL (mm) 73 mm
Average Rated Life 800 h

Physical attributes

Base Anode SFcY13-5
Base Cathode SFcY13-5
Bulb Shape KO172
Maximum Overall Length (mm) 190 mm
Length l1 (mm) 190 mm
Length l1 max. (mm) 190 mm
Length l2 (mm) 160 mm
Length l2 max. (mm) 161.5 mm
Diameter d (in) 1.142 in
Diameter d (mm) 29.00 mm
Distance a (mm) 73 mm
Electrode Gap - cold (mm) 4.5 mm
Reflector Coating 29.00

Additional product data

Operating Position Vertical, anode down
Maximum Base Temperature (ºC) 200 C
Cooling Convection
Class C (gas)
Lamp Type DOUBLE ENDED

Product number

EAN/UPC

Packaging

Quantity

Outside dimensions l x w x h

Gross weight

69205 4050300021089 Shipping box (Case) 1 8.5in x 2.8in x 3.7in 0.5lb