HBO 500 W/A

Product features and benefits
  • High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
  • Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
  • Designed for long lasting performance
  • Qualified with ASML
Areas of application
  • Semiconductor

Technical Data

General product information

Product Number

69205

Product Name

HBO500WA 60V 10/CS 1/SKU

Ordering Abbreviation

HBO 500 W/A

Brand Name

OSRAM

General Description

500 watt, mercury short arc, double-ended lamp for semiconductor
applications in ASML PAS 5000/50,/60,/80 stepper(s)

Application

Semiconductor

Product Remark

  • Lamp service life is defined with a switch-on/switch off duty cycle of 12hours ON / 30 minutes OFF.
  • Lamp base(s) with M 5x0.9 thread.

Electrical data

Nominal Wattage

500 W

Nominal Voltage

60 V

Current (A)

8.3 A

Type of Current

DC

Light technical data

Average Luminance (cd/cm2)

37000 cd/cm2

Radiant intensity in 350-450 nm range (mW/sr)

6230 mW/sr

Radiant Power in 350-450 nm range (W)

61 W

Light Center Length - LCL (mm)

73 mm

Average Rated Life

800 h

Physical attributes

Base Anode

SFcY13-5

Base Cathode

SFcY13-5

Bulb Shape

KO172

Maximum Overall Length (mm)

190 mm

Length l1 (mm)

190 mm

Length l1 max. (mm)

190 mm

Length l2 (mm)

160 mm

Length l2 max. (mm)

161.5 mm

Diameter d (in)

1.142 in

Diameter d (mm)

29.00 mm

Distance a (mm)

73 mm

Electrode Gap - cold (mm)

4.5 mm

Reflector Coating

29.00

Additional product data

Operating Position

Vertical, anode down

Maximum Base Temperature (ºC)

200 C

Cooling

Convection

Class

C (gas)

Lamp Type

DOUBLE ENDED

Packaging information

Product number

EAN/UPC

Packaging

Quantity

Outside dimensions l x w x h

Gross weight

69205 4050300021089 Shipping box (Case) 1 8.5in x 2.8in x 3.7in 0.5lb

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